Friday, December 25, 2015

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

This book focuses on the latest development of devices and fabrication processes in the field of extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research.


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